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Histogram of a Study of Dislocation Densities


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This layout presentation displays data from a study of dislocation densities on disk-shaped semiconductor wafers. The presentation consists of two graphs. The first graph is a dislocation density histogram, generated from data stored in multiple worksheets, and plotted as a column/bar type graph. The columns in this graph are color coded such that data of the same color originate from the same worksheet. The second graph is a scatter plot of the location of a measured value on the wafer. The color coding in the scatter graph is consistent with the color coding in the histogram. The location of a value on the wafer is thus correlated to the value of the dislocation density. Analysis of the raw data and the creation of the color plots were performed using a script written in Origin.

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