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Polar Contour Plot of Wafer Thickness


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Shown is a Polar Contour plot of semiconductor wafer thickness measurements as a function of the wafer radius in millimeters and the angle. Measurements were taken at different notches in the wafer.

Note: This graph is an example of Origin's built-in Polar Contour plot. This graph can be created directly from data organized as theta, radius, Z or radius, theta, Z. The data is directly plotted as a contour graph using triangulation.

Submitted by:
Peter Wrschka, Ph.D.
ATMI
Tempe, AZ

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